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S. Peter, K. Graupner, D. Grambole and F. Richter, “Comparative Experimental Analysis of the a-C:H Depo-sition Processes Using CH4 and C2H2 as Precursors,” Journal of Applied Physics, Vol. 102, No. 5, 2007, pp. 1-18. doi:10.1063/1.2777643

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