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N. M. S. Marins, R. P. Mota, D. C. R. Santos, R. Y. Honda, M. E. Kayama, K. G. Kostov, M. A. Algatti, N. C. Cruz and E. C Rangel, “Amorphous Hydrogenated Carbon Films Treated by SF6 Plasma,” Journal of Physics: Conference Series, Vol. 167, No. 1, 2009, pp. 1-4.

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