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F. Zhao, H. X. Li, L. Ji, Y. F. Mo, W. L. Quan, H. D. Zhou and J. M. Chen, “Structural, Mechanical and Tri-bological Characterizations of a-C:H:Si Films Prepared by Hybrid PECVD and Sputtering Technique,” Journal of Physics D: Applied Physics, Vol. 42, No. 16, July 2009, pp. 1-13. doi:10.1088/0022-3727/42/16/165407

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