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E. Peiner, A. Tibrewala, R. Bandorf, H. Lüthje, L. Doering and W. Limmer, “Diamond-Like Carbon for MEMS,” Journal of Micromechanics and Microengineering, Vol. 17, No. 7, June 2007, pp. S83-S90. doi:10.1088/0960-1317/17/7/S04

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