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Matsunami, O. Fukuoka, M. Tazawa and M. Sataka, “Composition and Optical Properties of Silicon Nitride Films Grown on SiO2-Glass and R-Al2O3 Substrates by Reactive RF Magnetron Sputtering,” Surface Coating Technology, Vol. 196, 2005, p. 50. doi:10.1016/j.surfcoat.2004.08.093

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