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Callegari, A., Cartier, E., Gribelyuk, M., Okom-Schmidt, H.F. and Zabel, T. (2001) Physical and Electrical Characterization of Hafnium Oxide and Hafnium Silicate Sputtered Films. Journal of Applied Physics, 90, 6466.
https://doi.org/10.1063/1.1417991

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