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Kobayashi, S., Ohrui, N., Chao, Y.C., Aoki, T., Kobayashi, H. and Asakawa, T. (2007) Deposition of Luminescent a-SiNx:H Films with SiH4–N2 Gas Mixture by VHF–PECVD Using Novel Impedance Matching Method. Journal of Materials Science: Materials in Electronics, 18, S29-S32.

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