Article citationsMore>>

Kobayashi, S., Ohrui, N., Chao, Y.C., Aoki, T., Kobayashi, H. and Asakawa, T. (2007) Deposition of Luminescent a-SiNx:H Films with SiH4–N2 Gas Mixture by VHF–PECVD Using Novel Impedance Matching Method. Journal of Materials Science: Materials in Electronics, 18, S29-S32.

has been cited by the following article:

Follow SCIRP
Twitter Facebook Linkedin Weibo
Contact us
customer@scirp.org
WhatsApp +86 18163351462(WhatsApp)
Click here to send a message to me 1655362766
Paper Publishing WeChat
Free SCIRP Newsletters
Copyright © 2006-2022 Scientific Research Publishing Inc. All Rights Reserved.
Top