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has been cited by the following article:

• TITLE: Terahertz Metamaterial-Based Microbolometers Fabricated by Conventional MEMS

  AUTHORS: Tianhong Ao, Xiangdong Xu, Yu Gu, Zhegeng Chen, Yadong Jiang, Xinrong Li, Yuxiang Lian, Fu Wang, Qiong He

  KEYWORDS: Metamaterial, Absorber, MEMS, THz

  JOURNAL NAME: Optics and Photonics Journal, Vol.6 No.8B, August 25, 2016

  ABSTRACT: 37 μm × 37 μm array of metamaterial-based microbolometers was designed and successfully fa-bricated by conventional MEMS technology. FTIR measurements reveal that the as-designed mi-crobolometers exhibit a high absorption of ~31.5% at 3.93 THz. In contrast, no response can be detected from those microbolometers without metamaterials. The experimental results have been confirmed by simulations.