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has been cited by the following article:

• TITLE: Preparation of Cr2O3-Ta2O5 Composites Using RF Magnetron Sputtering

  AUTHORS: Kenta Miura, Takumi Osawa, Yuya Yokota, Osamu Hanaizumi

  KEYWORDS: Ta2O5, Cr2O3, Co-Sputtering, X-Ray Diffraction, Photoluminescence

  JOURNAL NAME: Open Access Library Journal, Vol.2 No.12, December 14, 2015

  ABSTRACT: We prepared Cr2O3-Ta2O5 composite films using our RF magnetron co-sputtering method for the first time. X-ray diffraction (XRD) patterns and photoluminescence (PL) spectra of the films annealed at 700℃, 800℃, 900℃, and 1000℃ were evaluated. From their XRD patterns, the Cr2O3-Ta2O5 film annealed at 700℃ seemed to be almost amorphous, and the one annealed at 800℃ seemed to be hexagonal Ta2O5 doped with Cr. In addition, the Cr2O3-Ta2O5 films annealed at 900℃ and 1000℃ seemed to include tetragonal CrTaO4 phases. Furthermore, it seems that almost no defect exists in our Cr2O3-Ta2O5 composite films annealed at 700℃ - 1000℃ because their PL spectra have no defect-related peak. We thus find that good-qualityCr2O3-Ta2O5 composite films including CrTaO4 canbe obtained using our very simple co-sputtering method and subsequent annealing above 900℃.