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Guo, L., Ding, J., Yang, J., Cheng, G. and Ling, Z. (2011) Effects of High Hydrogen Dilution Ratio on Surface Topography and Mechanical Properties of Hydrogenated Nanocrystalline Silicon Thin Films. Thin Solid Films, 519, 6039-6043.
http://dx.doi.org/10.1016/j.tsf.2011.04.117

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