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Ranganathan, R., Krull, W., Sundstrom, H. and Mack, M. (1998) Characterization of a High Current Ultra Low Energy Ion Implanter. 1998 International Conference on Ion Implantation Technology Proceedings, Kyoto, 22-26 June 1998, 618-621.
http://dx.doi.org/10.1109/IIT.1999.812192

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