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Kase, M., Kikuchi, Y., Kubo, T., Niwa, H. and Fukuda, T. (1998) Issues of Ultra Shallow Junction Formation Using Sub-1 keV Ion Implantation. 1998 International Conference on Ion Implantation Technology, Proceedings, Vol. 1 Kyoto, 22-26 June 1998, 110-113.

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