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H. Kinoshita, M. Kubota and G. Ohno, “Deposition of Amorphous Carbon Nitride Films Using Ar/N2 Supermagnetron Sputter,” Thin Solid Films, Vol. 518, No. 13, 2010, pp. 3502-3505. doi:10.1016/j.tsf.2009.11.051

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