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H. Kinoshita, M. Kiyama and H. Suzuki, “Supermagnetron Plasma CVD of Highly Effective a-CNx:H Electron-Transport and Hole-Blocking Films Suited to Au/a-CNx:H/p-Si Photovoltaic Cells,” Thin Solid Films, Vol. 517, Issue 14, 2009, pp. 4218-4221. doi:10.1016/j.tsf.2009.02.006

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