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T. Wallendorf, S. Marke, C. May and J. Strumpfel, “Optical Investigations in a PEM Controlled Reactive Magnetron Sputter Process for Aluminium Doped Zinc Oxide Layers Using Metallic Alloy Targets,” Surface and Coatings Technology, Vol. 174-175, 2003, pp. 222-228.
http://dx.doi.org/10.1016/S0257-8972(03)00696-0

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