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P. D. Nsimama, G. A. Niklasson, M. E. Samiji, G. W. Mbise and J. Wennerberg, “Plasma Emission Monitoring (PEM) Controlled DC Reactive Sputtered ZnO:Al Thin Films,” Vacuum, Vol. 86, No. 12, 2012, pp. 1939-1944.
http://dx.doi.org/10.1016/j.vacuum.2012.03.052

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