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S. Lee, S. Bang, J. Park, S. Park, W. Jeong and H. Jeon, “The Effect of Oxygen Remote Plasma Treatment on ZnO TFTs Fabricated by Atomic Layer Deposition,” Physica Status Solidi, Vol. 207, No. 8, 2010, pp. 1845-1849. http://dx.doi.org/10.1002/pssa.200925514

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