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K. D. Shcherbachev, V. T. Bublik, V. N. Mordkovich and D. M. Pazhin, “The Effect of in Situ Photoexcitation on the Generation of Damaged Structures during Ion Implantation into Si Wafers,” Journal of Physics D: Applied Physics, Vol. 38, No. 10A, 2005, pp. A126-A131. doi:10.1088/0022-3727/38/10A/024

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