A Theoretical Study on Van Der Pauw Measurement Values of Inhomogeneous Compound Semiconductor Thin Films
Toru Matsumura, Yuichi Sato
DOI: 10.4236/jmp.2010.15048   PDF    HTML     12,526 Downloads   24,702 Views   Citations


The influence of intermixing heterogeneous regions that have different electrical properties from the base materials on van der Pauw measurement values was theoretically studied by computer simulation using the finite-element method. The measurement samples selected were thin films of inhomogeneous semiconductors. Calculated electrical properties, such as resistivity, carrier density, and mobility of the thin films, varied in predictable ways when heterogeneous regions were dispersed in wide ranges over the samples. On the other hand, the mobility of the thin films showed a different change when heterogeneous regions were locally concentrated in the measurement samples.

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T. Matsumura and Y. Sato, "A Theoretical Study on Van Der Pauw Measurement Values of Inhomogeneous Compound Semiconductor Thin Films," Journal of Modern Physics, Vol. 1 No. 5, 2010, pp. 340-347. doi: 10.4236/jmp.2010.15048.

Conflicts of Interest

The authors declare no conflicts of interest.


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