A Study of Design Optimization Using Response Surface Analysis and Fabricaiton MEMS Probe Tip

DOI: 10.4236/jamp.2015.32030   PDF   HTML   XML   4,752 Downloads   5,192 Views  


In semiconductor manufacturing process, probe station that is testing equipment is important. Inspection step is for detecting defects on semiconductor before the packaging. Probe card is a part of probe station and contains probe tip that contacts to semiconductor. Through probe tip, it can inspect defects of semiconductor. In this paper, optimization method is used with response surface analysis to design MEMS type probe tip. And fabricating probe tip uses maskless lithography, electro-plating and lapping process.

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Kim, K. , Lee, J. , Ha, S. , Cho, Y. and Cho, M. (2015) A Study of Design Optimization Using Response Surface Analysis and Fabricaiton MEMS Probe Tip. Journal of Applied Mathematics and Physics, 3, 201-207. doi: 10.4236/jamp.2015.32030.

Conflicts of Interest

The authors declare no conflicts of interest.


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