Comparison on Morphological and Optical Properties of TiO2 Thin Films Grown by Single-Pulse and Multi-Pulse Laser Ablation

DOI: 10.4236/jsemat.2015.51002   PDF   HTML   XML   3,155 Downloads   3,700 Views   Citations


TiO2 thin films were prepared on glass substrates using the PLD (Pulsed Laser Deposition) technique. In order to carry out the ablation process, a Nd:YAG laser was used emitting in 1064 nm wavelength at 10 Hz repetition rate, set up for operating in both single-pulse and multi-pulse regimes. A comparison of the deposition rate, the optical and morphological properties of the layers obtained from both ablation regimes was made, which showed that the multi-pulsed ablation produced layers with a higher surface quality and better optical properties.

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Peñaloza-Mendoza, Y. and Ponce-Cabrera, L. (2015) Comparison on Morphological and Optical Properties of TiO2 Thin Films Grown by Single-Pulse and Multi-Pulse Laser Ablation. Journal of Surface Engineered Materials and Advanced Technology, 5, 17-23. doi: 10.4236/jsemat.2015.51002.

Conflicts of Interest

The authors declare no conflicts of interest.


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