Drive and Control of Electromagnetic Drive Module on Reciprocally Rotating Disc Used for Micro-Gyroscope
Nan-Chyuan Tsai, Jiun-Sheng Liou, Chih-Che Lin, Tuan Li
.
DOI: 10.4236/jemaa.2010.26047   PDF    HTML     4,993 Downloads   8,552 Views   Citations

Abstract

An innovative 3-phase AC (Alternative Current) drive circuit for the seismic disc in micro-gyroscopes is designed and verified by computer simulations and experiments. The in-plane dynamic model of the seismic disc with mass eccentricity and air gap against the centre bearing and the mathematic expression of two sinusoidal magnetic fields are developed respectively. In order to prevent the seismic disc from collision with the centre bearing and the EM (Electromagnetic) poles, an anti-collision controller is established by employing two Look-up tables which define the intensity of the applied current to the EM poles. Self-sensing technique is included to measure the real-time offset of the disc by two orthogonal pairs of EM poles, without any additional sensors. The drive circuit under SPWM (Sinusoidal Pulse Width Modulation) operation and the anti-collision strategy are verified by intensive computer simulations via commercial software, OrCAD 9, and experiments.

Share and Cite:

N. Tsai, J. Liou, C. Lin and T. Li, "Drive and Control of Electromagnetic Drive Module on Reciprocally Rotating Disc Used for Micro-Gyroscope," Journal of Electromagnetic Analysis and Applications, Vol. 2 No. 6, 2010, pp. 362-371. doi: 10.4236/jemaa.2010.26047.

Conflicts of Interest

The authors declare no conflicts of interest.

References

[1] P. Greiff, B. Boxenhom, T. King and L. Niles, “Silicon Monolithic Micromechanical Gyroscope,” in: Proceedings of Technical Digest 6th International Conference Transducers’91, San Francisco, 1991, pp. 966-968.
[2] S. Lee, S. Park, J. Kim and D. Cho, “Surface/Bulk Micromachined Single-Crystalline-Silicon Micro-Gyrosco- pe,” Journal of Microelectromechanical Systems, Vol. 9, No. 4, 2000, pp. 557-567.
[3] A. Shkel, R. T. Howe and R. Horowitz, “Modeling and Simulation of Micromachined Gyroscopes in the Presence of Imperfections,” in: Proceedings of International Conference on Modeling and Simulation of Microsystems, Pasadena, 1999, pp. 605-608.
[4] S. Park, D. Kwak, H. Ko and T. Song, “Selective Silicon-on-Insulator (SOI) Implant: A New Micromachining Method without Footing and Residual Stress,” Journal of Micromechanics and Microengineering, Vol. 15, No. 9, 2005, pp. 1607-1613.
[5] T. Sarros, E. C. Chew, S. Crase, B. K. Tay and W. L. Soong, “Investigation of Cylindrical and Conical Electrostatic Wobble Micromotors,” Microelectronics Journal, Vol. 33, No. 1-2, 2002, pp. 129-140.
[6] T. C. Neugebauer, D. J. Perreault, J. H. Lang and C. Livermore, “A Six-Phase Multilevel Inverter for MEMS Electrostatic Induction Micromotors,” IEEE Transactions on Circuits and Systems—II: Express Briefs, Vol. 51, 2004, pp. 49-56.
[7] N.-C. Tsai, J.-S. Liou, C.-C. Lin and T. Li, “Analysis and Fabrication of Reciprocal Motors Applied for Micro-Gyroscopes,” Journal of Micro/Nanolithography, ME- MS, and MOEMS, Vol. 8, No. 4, 2009, p. 043046.
[8] A. Endemaño, J. Y. Fourniols, H. Camon, A. Marchese, S. Muratet, F. Bony, M. Dunnigan, M. P. Y. Desmulliez and G. Overton, “VHDL-AMS Modelling and Simulation of a Planar Electrostatic Micromotor,” Journal of Micromechanics and Microengineering, Vol. 13, No. 5, 2003, pp. 580-590.
[9] Y. Lefèvre, M. L. Mazenc, E. Sarraute and H. Camon, “First Steps towards Design, Simulation, Modelling and Fabrication of Electrostatic Micromotors,” Sensor and Actuator A: Physical, Vol. 47, No. 1, 1995, pp. 645-648.
[10] C. Yang, X. Zhao, G. Ding, C. Zhang and B. Cai, “An Axial Flux Electromagnetic Micromotor,” Journal of Micromechanics and Microengineering, Vol. 11, No. 2, 2001, pp. 113-117.
[11] Y. Suzuki, K. Tani and T. Sakuhara, “Development of a New Type Piezoelectric Micromotor,” Sensor and Actuator A: Physical, Vol. 83, No. 1, 2000, pp. 244-248.
[12] J. Tong, T. Cui, P. Shao and L. Wang, “Piezoelectric Micromotor Based on the Structure of Serial Bending Arms,” IEEE Transactions on Iicihasonics, Ferroelectrics, and Frequexcy Control, Vol. 50, 2003, pp. 1100-1104.
[13] W. C. Wong, X. Zhang, S. A. Jacobson and A. H. Epstein, “A Self-Acting Gas Thrust Bearing for High-Speed Microrotors,” Journal of Microelectromechanical Systems, Vol. 13, No. 2, 2004, pp. 158-164.
[14] W. M. Zhang, G. Meng, J. B. Zhou and J. Y. Chen, “Slip Model for the Ultra-thin Gas-lubricated Slider Bearings of an Electrostatic Micromotor in MEMS,” Microsystem Technologies, Vol. 45, No. 9-11, 2005, pp. 1230-1242.
[15] N. Ghalichechian, A. Modafe, M. I. Beyaz and R. Ghodssi, “Design, Fabrication, and Characterization of a Rotary Micromotor Supported on Microball Bearings,” Journal of Microelectromechanical Systems, Vol. 136, No. 2, 2007, pp. 496-503.
[16] N.-C. Tsai, C.-W. Chiang and H.-Y. Li, “Innovative Active Magnetic Bearing Design to Reduce Cost and Energy Consumption,” Electromagnetics, Vol. 29, No. 5, 2009, pp. 406-420.

Copyright © 2024 by authors and Scientific Research Publishing Inc.

Creative Commons License

This work and the related PDF file are licensed under a Creative Commons Attribution 4.0 International License.