[1]
|
P. Greiff, B. Boxenhom, T. King and L. Niles, “Silicon Monolithic Micromechanical Gyroscope,” in: Proceedings of Technical Digest 6th International Conference Transducers’91, San Francisco, 1991, pp. 966-968.
|
[2]
|
S. Lee, S. Park, J. Kim and D. Cho, “Surface/Bulk Micromachined Single-Crystalline-Silicon Micro-Gyrosco- pe,” Journal of Microelectromechanical Systems, Vol. 9, No. 4, 2000, pp. 557-567.
|
[3]
|
A. Shkel, R. T. Howe and R. Horowitz, “Modeling and Simulation of Micromachined Gyroscopes in the Presence of Imperfections,” in: Proceedings of International Conference on Modeling and Simulation of Microsystems, Pasadena, 1999, pp. 605-608.
|
[4]
|
S. Park, D. Kwak, H. Ko and T. Song, “Selective Silicon-on-Insulator (SOI) Implant: A New Micromachining Method without Footing and Residual Stress,” Journal of Micromechanics and Microengineering, Vol. 15, No. 9, 2005, pp. 1607-1613.
|
[5]
|
T. Sarros, E. C. Chew, S. Crase, B. K. Tay and W. L. Soong, “Investigation of Cylindrical and Conical Electrostatic Wobble Micromotors,” Microelectronics Journal, Vol. 33, No. 1-2, 2002, pp. 129-140.
|
[6]
|
T. C. Neugebauer, D. J. Perreault, J. H. Lang and C. Livermore, “A Six-Phase Multilevel Inverter for MEMS Electrostatic Induction Micromotors,” IEEE Transactions on Circuits and Systems—II: Express Briefs, Vol. 51, 2004, pp. 49-56.
|
[7]
|
N.-C. Tsai, J.-S. Liou, C.-C. Lin and T. Li, “Analysis and Fabrication of Reciprocal Motors Applied for Micro-Gyroscopes,” Journal of Micro/Nanolithography, ME- MS, and MOEMS, Vol. 8, No. 4, 2009, p. 043046.
|
[8]
|
A. Endemaño, J. Y. Fourniols, H. Camon, A. Marchese, S. Muratet, F. Bony, M. Dunnigan, M. P. Y. Desmulliez and G. Overton, “VHDL-AMS Modelling and Simulation of a Planar Electrostatic Micromotor,” Journal of Micromechanics and Microengineering, Vol. 13, No. 5, 2003, pp. 580-590.
|
[9]
|
Y. Lefèvre, M. L. Mazenc, E. Sarraute and H. Camon, “First Steps towards Design, Simulation, Modelling and Fabrication of Electrostatic Micromotors,” Sensor and Actuator A: Physical, Vol. 47, No. 1, 1995, pp. 645-648.
|
[10]
|
C. Yang, X. Zhao, G. Ding, C. Zhang and B. Cai, “An Axial Flux Electromagnetic Micromotor,” Journal of Micromechanics and Microengineering, Vol. 11, No. 2, 2001, pp. 113-117.
|
[11]
|
Y. Suzuki, K. Tani and T. Sakuhara, “Development of a New Type Piezoelectric Micromotor,” Sensor and Actuator A: Physical, Vol. 83, No. 1, 2000, pp. 244-248.
|
[12]
|
J. Tong, T. Cui, P. Shao and L. Wang, “Piezoelectric Micromotor Based on the Structure of Serial Bending Arms,” IEEE Transactions on Iicihasonics, Ferroelectrics, and Frequexcy Control, Vol. 50, 2003, pp. 1100-1104.
|
[13]
|
W. C. Wong, X. Zhang, S. A. Jacobson and A. H. Epstein, “A Self-Acting Gas Thrust Bearing for High-Speed Microrotors,” Journal of Microelectromechanical Systems, Vol. 13, No. 2, 2004, pp. 158-164.
|
[14]
|
W. M. Zhang, G. Meng, J. B. Zhou and J. Y. Chen, “Slip Model for the Ultra-thin Gas-lubricated Slider Bearings of an Electrostatic Micromotor in MEMS,” Microsystem Technologies, Vol. 45, No. 9-11, 2005, pp. 1230-1242.
|
[15]
|
N. Ghalichechian, A. Modafe, M. I. Beyaz and R. Ghodssi, “Design, Fabrication, and Characterization of a Rotary Micromotor Supported on Microball Bearings,” Journal of Microelectromechanical Systems, Vol. 136, No. 2, 2007, pp. 496-503.
|
[16]
|
N.-C. Tsai, C.-W. Chiang and H.-Y. Li, “Innovative Active Magnetic Bearing Design to Reduce Cost and Energy Consumption,” Electromagnetics, Vol. 29, No. 5, 2009, pp. 406-420.
|