A solution-processed zinc oxide (ZnO) thin film as the buffer layer with optimized processes especially the annealing conditions for inverted polymer solar cells (PSCs) has been demonstrated. Firstly the thickness of ZnO buffer layer was optimized, and different annealing conditions including temperature and time have also been taken into consideration. And the best Power Conversion Efficiency (PCE) 3.434% was observed when the ZnO buffer layer was spin–coated at 1500 rpm and annealed at 275℃ for 5 min, and AFM results showed that morphology of this ZnO film has the best uniformity which was beneficial to form high quality polymer composite active layer.