Author(s)

Towhid Adnan Chowdhury

Department of Electrical & Electronic Engineering, Ahsanullah University of Science & Technology, Dhaka, Bangladesh.

Spray pyrolysis method was used to deposit Lutetium Oxide (Lu₂O₃) thin films using lutetium (III) chloride as source material and water as oxidizer. Annealing was carried out in argon atmosphere at 450°C for 60 minutes of the films. To investigate the composition and stoichiometry of sprayed as-deposited and annealed Lu₂O₃ thin films, depth profile studies using X-ray photoelectron spectroscopy (XPS) was done. Nearly stoichiometric was observed for both annealed and as-deposited films in inner and surface layers.

Lu₂O₃, Depth Profiling, X-Ray Photoelectron Spectroscopy, Thin Films

Chowdhury, T. (2023) Investigation of Sprayed Lu₂O₃ Thin Films Using XPS. Advances in Materials Physics and Chemistry, 13, 197-205. doi: 10.4236/ampc.2023.1311014.