Surface Roughness Modification of Free Standing Single Crystal Silicon Microstructures Using KrF Excimer Laser Treatment for Mechanical Performance Improvement

ISSN Print: 2161-4881
ISSN Online: 2161-489X

Website: https://www.scirp.org/journal/jsemat
E-mail: jsemat@scirp.org

Citations h5-index & Ranking

Submission

"Surface Roughness Modification of Free Standing Single Crystal Silicon Microstructures Using KrF Excimer Laser Treatment for Mechanical Performance Improvement"
written by Mohamed Elwi Mitwally, Toshiyuki Tsuchiya, Osamu Tabata, Sherif Sedky,
published by Journal of Surface Engineered Materials and Advanced Technology, Vol.5 No.1, 2015

has been cited by the following article(s):

[1]	犛犗犐纳米光波导激光熔凝光整加工温度场的数值模拟及分析
	2017

[2]	Crystal orientation-dependent fatigue characteristics in micrometer-sized single-crystal silicon
	Microsystems & Nanoengineering, 2016

[3]	Effect of Localized Laser Treatment on Fatigue Performance of Single-Crystal Silicon Microstructures
	Sensors and Materials, 2016