"In-Situ Monitoring of Chemical Vapor Deposition from Trichlorosilane Gas and Monomethylsilane Gas Using Langasite Crystal Microbalance"
written by Hitoshi Habuka, Yurie Tanaka,
published by Journal of Surface Engineered Materials and Advanced Technology, Vol.3 No.1A, 2013
has been cited by the following article(s):
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