Journal of Surface Engineered Materials and Advanced Technology

Journal of Surface Engineered Materials and Advanced Technology

ISSN Print: 2161-4881
ISSN Online: 2161-489X
www.scirp.org/journal/jsemat
E-mail: jsemat@scirp.org
"In-Situ Monitoring of Chemical Vapor Deposition from Trichlorosilane Gas and Monomethylsilane Gas Using Langasite Crystal Microbalance"
written by Hitoshi Habuka, Yurie Tanaka,
published by Journal of Surface Engineered Materials and Advanced Technology, Vol.3 No.1A, 2013
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