Surface Roughness Modification of Free Standing Single Crystal Silicon Microstructures Using KrF Excimer Laser Treatment for Mechanical Performance Improvement

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ISSN Print: 2161-4881
ISSN Online: 2161-489X
www.scirp.org/journal/jsemat
E-mail: jsemat@scirp.org

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"Surface Roughness Modification of Free Standing Single Crystal Silicon Microstructures Using KrF Excimer Laser Treatment for Mechanical Performance Improvement"
written by Mohamed Elwi Mitwally, Toshiyuki Tsuchiya, Osamu Tabata, Sherif Sedky,
published by Journal of Surface Engineered Materials and Advanced Technology, Vol.5 No.1, 2015

has been cited by the following article(s):

[1]	Finishing of Rough Sidewalls of a Silicon-on-Insulator Nano-Optical Waveguide Using Laser Surface Melting
	Strength of Materials, 2021

[2]	犛犗犐纳米光波导激光熔凝光整加工温度场的数值模拟及分析
	2017

[3]	SOI 纳米光波导激光熔凝光整加工温度场的数值模拟及分析
	2017

[4]	Effect of Localized Laser Treatment on Fatigue Performance of Single-Crystal Silicon Microstructures
	Sensors and Materials, 2016

[5]	Crystal orientation-dependent fatigue characteristics in micrometer-sized single-crystal silicon
	Microsystems & Nanoengineering, 2016

[1]	Finishing of Rough Sidewalls of a Silicon-on-Insulator Nano-Optical Waveguide Using Laser Surface Melting Strength of Materials, 2021 DOI:10.1007/s11223-021-00328-5

[2]	Crystal orientation-dependent fatigue characteristics in micrometer-sized single-crystal silicon Microsystems & Nanoengineering, 2016 DOI:10.1038/micronano.2016.27

[3]	Crystal orientation-dependent fatigue characteristics in micrometer-sized single-crystal silicon Microsystems & Nanoengineering, 2016 DOI:10.1038/micronano.2016.27

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