://onlinelibrary.wiley.com/doi/10.1002/pssc.201510002/abstract" target="_blank">In‐situ observation of chemical vapor deposition using SiHCl3 and BCl3 gases physica status solidi (c), 2015 [8] Langasite crystal microbalance frequency behavior over wide gas phase conditions for chemical vapor deposition Surface and Coatings Technology, 2013 [9] Method for determining chemical vapor deposition occurrence using langasite crystal microbalance H Habuka - science24.com, 2013
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