Author(s)

Olusegun J. Ilegbusi^1*, S. M. Navid Khatami¹, Leonid I. Trakhtenberg^2,3

¹Department of Mechanical and Aerospace Engineering, University of Central Florida, Orlando, FL, USA.
²Semenov Institute of Chemical Physics, Russian Academy of Sciences, Moscow, Russia.
³Moscow Institute of Physics and Technology (State University), Dolgoprudny, Moscow Region, Russia.

The influence of processing parameters is investigated on the structural characteristics of single and mixed oxides produced by spray pyrolysis technique. The films were synthesized by spraying precursor solutions through a noz-zle onto a heated alumina substrate. The precursor consisted separately of aqueous solutions of tin chloride for SnO₂ and zinc chloride for ZnO for single oxide cases, and aqueous solutions of tin chloride and indium nitrate for SnO₂ + In₂O₃ and zinc chloride and indium nitrate solutions for ZnO + In₂O₃ for mixed oxide cases. The substrate temperature was varied accordingly for each single and mixed case. The films produced were characterized by X-ray Photoelectron Spectroscopy and Scanning Electron Microscopy. The results indicate that a non-homogenous film is formed at low temperature for both single oxides considered. The temperature has significant effect on the composition of the synthesized films of both single oxides below 450℃. The results for mixed oxides show that the best homogeneous films are obtained for 80 wt% ZnO + 20 wt% In₂O₃, and 80 wt% SnO₂ + 20 wt% In₂O₃.

Zinc Oxide Film, Tin Oxide Film, Mixed Metal Oxides, Nano-Composite Sen-sors, Spray Pyrolysis

Ilegbusi, O. , Khatami, S. and Trakhtenberg, L. (2017) Spray Pyrolysis Deposition of Single and Mixed Oxide Thin Films. Materials Sciences and Applications, 8, 153-169. doi: 10.4236/msa.2017.82010.