Optical Spectroscopic Investigation of TiO2-Like Polymerization Processes by Inductively Coupled Plasma - Journal of Applied Mathematics and Physics

JAMP > Vol.4 No.8, August 2016

Optical Spectroscopic Investigation of TiO2-Like Polymerization Processes by Inductively Coupled Plasma ()

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Download as PDF (Size: 361KB) PP. 1528-1532

DOI: 10.4236/jamp.2016.48162 1,517 Downloads 2,363 Views Citations

Author(s)

Z. Li¹, X. Li¹, G. Liu¹, J.-J. Pireaux², L. Houssiau², N. Bonifaci³

Affiliation(s)

¹Guizhou Institute of Technology, Guiyang, China.
²Research Centre in Physics of Matter and Radiation (PMR), University of Namur (FUNDP), Namur, Belgium.
³G2Elab, Université de Grenoble, CNRS, Grenoble, France.

ABSTRACT

TiO2-like polymer films were synthesized by inductively coupled plasma in pulsed radio-frequency (RF) modes. The plasma chemistry, studied by optical emission spectroscopy, showed that the ra- dicals and fragments formed in the discharge were dependent on the precursor, and that the species density in the plasma gas is as a function of flux de gas that is used to carry the monomer into the plasma reactors.

KEYWORDS

Plasma, Polymerization, Surface

Share and Cite:

Li, Z. , Li, X. , Liu, G. , Pireaux, J. , Houssiau, L. and Bonifaci, N. (2016) Optical Spectroscopic Investigation of TiO2-Like Polymerization Processes by Inductively Coupled Plasma. Journal of Applied Mathematics and Physics, 4, 1528-1532. doi: 10.4236/jamp.2016.48162.

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