Author(s)

Xin Li, Yoshihiro Nakamura, Mikio Horie, Toshiharu Kagawa

Department of Mechano-Micro Engineering, Tokyo Institute of Technology, Yokohama, Japan.
Precision and Intelligence Laboratory, Tokyo Institute of Technology, Yokohama, Japan.

In this paper, we build an air conveyor with newly developed vortex bearing elements, and study the flotation precision of the front-end of the substrate in quasi-static flotation transport. We experimentally discuss the three influential factors: air supply pressure, thickness of the substrates and installing direction of the vortex bearing element. We find that during the process of transport the movement of the substrate leads to the variation of flotation height. The amplitude of variation (e.g. flotation precision) is dependent upon the bearing stiffness and the suction force of the vortex bearing elements. Increasing air supply pressure properly can improve the flotation precision, but an excess pressure can cause over-suction due to high negative pressure and result in a poor flotation precision. We also know that the flotation precision of thin and light substrates are easily affected by the suction force of vortex flow because they float with a high flotation height and are more susceptible to deformation. Finally, we investigate four installing directions of the vortex bearing element. Different installing direction can lead to different variation of flotation height.

Flotation Transport; Air Conveyor; Vortex Bearing Element; Vortex Flow; Suction Force

X. Li, Y. Nakamura, M. Horie and T. Kagawa, "An Experimental Investigation on the Quasi-Static Flotation Transport of a Glass Substrate Using Vortex Bearing Elements," Journal of Flow Control, Measurement & Visualization, Vol. 1 No. 1, 2013, pp. 6-12.