Author(s)

Lih-Chang Lin^*, Bor-Yih Chang, Biing-Der Liaw

Department of Mechanical Engineering, National Chung Hsing University, Taichung.

This paper considers the analytical dynamics with simplified Dahl hysteresis model for a three-axis piezoactuated micro/nano flexure stage. An adaptive controller with nonlinear dynamic hysteresis observer is proposed using Lyapunov stability theory. In the controller, a fuzzy function approximator with parameters update law is included to compensate for the identification inaccuracy, model uncertainty, and flexure coupling effects. Simulation results are used to demonstrate the control performance.

Micro/Nano Stage; Adaptive Fuzzy Control; Hysteresis Observer; Fuzzy Function Approximator

L. Lin, B. Chang and B. Liaw, "Stable Adaptive Fuzzy Control with Hysteresis Observer for Three-Axis Micro/Nano Motion Stages," Intelligent Control and Automation, Vol. 3 No. 4, 2012, pp. 390-403. doi: 10.4236/ica.2012.34043.