Dr. Bin Tang
China Academy of Engineering Physics, China
Professor
Email: john46311@hotmail.com
Qualifications
2008–2010 Ph.D., Department of Micro/nano Systems Engineering, Nagoya
University, Japan
2005–2008 M.Sc., Department of Opto-electronic Engineering, Chongqing
University, China
2001-2005 B.Sc., Department of Opto-electronic Engineering, Chongqing
University, China
Publications (selected)
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B. Tang and Kazuo Sato (2011) Formation of Silicon Nano Tips in
Surfactant-Modified Wet Anisotropic Etching, Applied Physics Express, 4, 056501.
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Prem Pal, K. Sato, M.A Gosalvez, B. Tang, H. Hida and M. Shikida (2011)
Fabrication of novel microstructures based on orientation-dependent adsorption
of surfactant molecules in a TMAH solution, Journal of Micromechanics and
Microengineering, 21, 015008.
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B. Tang, M. Shikida, K. Sato, Prem Pal, H. Amakawa, H. Hida and K.
Fukuzawa (2010) Study of surfactant-added TMAH for applications in DRIE and wet
etching-based micromachining, Journal of Micromechanics and Microengineering,
20, 65008
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B. Tang, Prem Pal, M.A. Gosalvez, M. Shikida, K. Sato, H. Amakawa and S.
Itoh (2009) Ellipsometry study of the adsorbed surfactant thickness on Si{110}
and Si{100} and the effect of pre-adsorbed surfactant layer on etching
characteristics in TMAH, Sensors and Actuators A, 156, 334-341.
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M.A. Gosalvez, B. Tang, Prem Pal, K. Sato, Y. Kimura and K. Ishibashi
(2009) Orientation and concentration dependent surfactant adsorption on silicon
in aqueous alkaline solutions: explaining the changes in the etch rate, roughness
and undercutting for MEMS applications, Journal of Micromechanics and
Microengineering, 19, 125011.
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Prem Pal, K. Sato, M.A. Gosalvez, Y. Kimura, K. Ishibashi, M. Niwano, H.
Hida, B. Tang and S. Itoh (2009) Surfactant adsorption on single crystal
silicon surfaces in TMAH solution: Orientation-dependent adsorption detected by
in-situ infra-red spectroscopy, IEEE Journal of Microelectromechanical Systems,
18, 1345-1356.