Dr. Bin Tang

China Academy of Engineering Physics, China




2008–2010 Ph.D., Department of Micro/nano Systems Engineering, Nagoya University, Japan

2005–2008 M.Sc., Department of Opto-electronic Engineering, Chongqing University, China

2001-2005 B.Sc., Department of Opto-electronic Engineering, Chongqing University, China

Publications (selected)

  1. B. Tang and Kazuo Sato 2011 Formation of Silicon Nano Tips in Surfactant-Modified Wet Anisotropic Etching, Applied Physics Express, 4, 056501.
  2. Prem Pal, K. Sato, M.A Gosalvez, B. Tang, H. Hida and M. Shikida (2011) Fabrication of novel microstructures based on orientation-dependent adsorption of surfactant molecules in a TMAH solution, Journal of Micromechanics and Microengineering, 21, 015008.
  3. B. Tang, M. Shikida, K. Sato, Prem Pal, H. Amakawa, H. Hida and K. Fukuzawa (2010) Study of surfactant-added TMAH for applications in DRIE and wet etching-based micromachining, Journal of Micromechanics and Microengineering, 20, 65008
  4. B. Tang, Prem Pal, M.A. Gosalvez, M. Shikida, K. Sato, H. Amakawa and S. Itoh (2009) Ellipsometry study of the adsorbed surfactant thickness on Si{110} and Si{100} and the effect of pre-adsorbed surfactant layer on etching characteristics in TMAH, Sensors and Actuators A, 156, 334-341.
  5. M.A. Gosalvez, B. Tang, Prem Pal, K. Sato, Y. Kimura and K. Ishibashi (2009) Orientation and concentration dependent surfactant adsorption on silicon in aqueous alkaline solutions: explaining the changes in the etch rate, roughness and undercutting for MEMS applications, Journal of Micromechanics and Microengineering, 19, 125011.
  6. Prem Pal, K. Sato, M.A. Gosalvez, Y. Kimura, K. Ishibashi, M. Niwano, H. Hida, B. Tang and S. Itoh (2009) Surfactant adsorption on single crystal silicon surfaces in TMAH solution: Orientation-dependent adsorption detected by in-situ infra-red spectroscopy, IEEE Journal of Microelectromechanical Systems, 18, 1345-1356.

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