Terahertz Metamaterial-Based Microbolometers Fabricated by Conventional MEMS (Articles)
Tianhong Ao, Xiangdong Xu, Yu Gu, Zhegeng Chen, Yadong Jiang, Xinrong Li, Yuxiang Lian, Fu Wang, Qiong He
Optics and Photonics Journal
Vol.6 No.8B,August 25, 2016
DOI:
10.4236/opj.2016.68B036
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