TEM Observation of Si0.99C0.01 Thin Films with Arsenic-Ion-, Boron-Ion-, and Silicon-Ion-Implantation Followed by Rapid Thermal Annealing (Articles)
Junji Yamanaka, Shigenori Inoue, Keisuke Arimoto, Kiyokazu Nakagawa, Kentarou Sawano, Yasuhiro Shiraki, Atsushi Moriya, Yasuhiro Inokuchi, Yasuo Kunii
Journal of Materials Science and Chemical Engineering
Vol.5 No.1,January 4, 2017
DOI:
10.4236/msce.2017.51003
2,881 Downloads 3,193 Views Citations
Selective Heating of Transition Metal Usings Hydrogen Plasma and Its Application to Formation of Nickel Silicide Electrodes for Silicon Ultralarge-Scale Integration Devices (Articles)
Tetsuji Arai, Hiroki Nakaie, Kazuki Kamimura, Hiroyuki Nakamura, Satoshi Ariizumi, Satoki Ashizawa, Keisuke Arimoto, Junji Yamanaka, Tetsuya Sato, Kiyokazu Nakagawa, Toshiyuki Takamatsu
Journal of Materials Science and Chemical Engineering
Vol.4 No.1,January 11, 2016
DOI:
10.4236/msce.2016.41006
3,370 Downloads 3,888 Views Citations
Ohmic Contact Formation for n+4H-SiC Substrate by Selective Heating Method Using Hydrogen Radical Irradiation (Articles)
Tetsuji Arai, Kazuki Kamimura, Chiaya Yamamoto, Mai Shirakura, Keisuke Arimoto, Junji Yamanaka, Kiyokazu Nakagawa, Toshiyuki Takamatsu, Masaaki Ogino, Masaaki Tachioka, Haruo Nakazawa
Journal of Materials Science and Chemical Engineering
Vol.5 No.1,January 4, 2017
DOI:
10.4236/msce.2017.51005
2,709 Downloads 3,136 Views Citations
Feasibility Study to Evaluate Lattice-Space Changing of a Step-Graded SiGe/Si (110) Using STEM Moiré (Articles)
Junji Yamanaka, Mai Shirakura, Chiaya Yamamoto, Kei Sato, Takane Yamada, Kosuke O. Hara, Keisuke Arimoto, Kiyokazu Nakagawa, Akimitsu Ishizuka, Kazuo Ishizuka
Journal of Materials Science and Chemical Engineering
Vol.6 No.7,July 4, 2018
DOI:
10.4236/msce.2018.67002
407 Downloads 648 Views Citations