Terahertz Metamaterial-Based Microbolometers Fabricated by Conventional MEMS (Articles)
Tianhong Ao, Xiangdong Xu, Yu Gu, Zhegeng Chen, Yadong Jiang, Xinrong Li, Yuxiang Lian, Fu Wang, Qiong He
Optics and Photonics Journal
Vol.6 No.8B,August 25, 2016
DOI:
10.4236/opj.2016.68B036
1,553 Downloads 2,196 Views Citations
A Generic MEMS Fabrication Process Based on a Thermal Budget Approach (Articles)
Carlos Ramón Báez Álvarez, Álvarez, Mónico Linares Aranda, Alfonso Torres Jácome, Mario Moreno Moreno, Joel Molina Reyes, Carlos Zúñiga Islas, Wilfrido Calleja Arriaga
Journal of Electronics Cooling and Thermal Control
Vol.6 No.2,June 29, 2016
DOI:
10.4236/jectc.2016.62009
1,823 Downloads 2,575 Views Citations