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Piezoelectric aluminum nitride thin films for CMOS compatible MEMS: Sputter deposition and doping
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2025
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Investigation of AlN-based Schottky type photodetector in visible light detection
Physica B: Condensed Matter,
2024
DOI:10.1016/j.physb.2024.416286
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High Thermal Conductivity of Submicrometer Aluminum Nitride Thin Films Sputter-Deposited at Low Temperature
ACS Nano,
2023
DOI:10.1021/acsnano.3c05485
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Electronic structure, thermodynamics, and thermoelectric properties of Y Al1−N semiconductor alloys for new promising optoelectronics and energy conversion: Ab Initio study
Materials Science in Semiconductor Processing,
2023
DOI:10.1016/j.mssp.2023.107571
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Photoluminescence Comparison of Different Substrates on AlN: Cr Thin Films for Optoelectronic Devices
Symposium on Advanced Materials,
2022
DOI:10.4028/p-1265j6
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III-Nitride LEDs
Advances in Optics and Optoelectronics,
2022
DOI:10.1007/978-981-19-0436-3_2
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Photoluminescence Comparison of Different Substrates on AlN: Cr Thin Films for Optoelectronic Devices
Symposium on Advanced Materials,
2022
DOI:10.4028/p-1265j6
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Strain-free ultrathin AlN epilayers grown directly on sapphire by high-temperature molecular beam epitaxy
Applied Physics Letters,
2020
DOI:10.1063/1.5144838
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Boosted ultraviolet electroluminescence of InGaN/AlGaN quantum structures grown on high-index contrast patterned sapphire with silica array
Nano Energy,
2020
DOI:10.1016/j.nanoen.2019.104427
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Strain-free ultrathin AlN epilayers grown directly on sapphire by high-temperature molecular beam epitaxy
Applied Physics Letters,
2020
DOI:10.1063/1.5144838
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Measurement and ab initio Investigation of Structural, Electronic, Optical, and Mechanical Properties of Sputtered Aluminum Nitride Thin Films
Frontiers in Physics,
2020
DOI:10.3389/fphy.2020.00115
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[12]
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Surface Acoustic Wave-Based Infrared Sensor With Aluminum Nitride Films Deposited
IEEE Sensors Journal,
2020
DOI:10.1109/JSEN.2020.2992697
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Aluminum nitride on insulator (AlNOI) platform for mid-infrared photonics
Optics Letters,
2019
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Evaluation of the formation of compound coatings on aluminium by the new method of active screen plasma nitriding
Materials Research Express,
2019
DOI:10.1088/2053-1591/ab17bd
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Thermal annealing study of the mid-infrared aluminum nitride on insulator (AlNOI) photonics platform
Optics Express,
2019
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The dependence of aluminum nitride thin-film microstructure on the number of low-temperature plasma-enhanced atomic layer deposition process cycles
Surface and Coatings Technology,
2019
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Emergence of high quality sputtered III-nitride semiconductors and devices
Semiconductor Science and Technology,
2019
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Fabrication of cantilever MEMs structure of C-axis grown AlN film for energy harvester application
2018 IEEE International Conference on Industrial Technology (ICIT),
2018
DOI:10.1109/ICIT.2018.8352312
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Synthesis and deposition of nanostructured SnS for semiconductor-sensitized solar cell
Journal of Solid State Electrochemistry,
2017
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Annealing of the sputtered AlN buffer layer on r
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physica status solidi (b),
2017
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Structural and optical studies of thin films of aluminum nitride grown via ion-plasma sputtering on gallium arsenide substrates with different orientations
Bulletin of the Russian Academy of Sciences: Physics,
2017
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Growing oriented AlN films on sapphire substrates by plasma-enhanced atomic layer deposition
Technical Physics Letters,
2017
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Characterization and optimization of sputtered AlN buffer layer on r-plane sapphire substrate to improve the crystalline quality of nonpolar a-plane GaN
Journal of Crystal Growth,
2017
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Annealing of the sputtered AlN buffer layer on r‐plane sapphire and its effect on a‐plane GaN crystalline quality
physica status solidi (b),
2017
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Growth of heteroepitaxial aluminium nitride films on aluminium oxide substrates via PEALD method
2016 14th International Baltic Conference on Atomic Layer Deposition (BALD),
2016
DOI:10.1109/BALD.2016.7886528
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Distinctions of the growth and structural-spectroscopic investigations of thin AlN films grown on the GaAs substrates
Physica B: Condensed Matter,
2016
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Growth features and spectroscopic structure investigations of nanoprofiled AlN films formed on misoriented GaAs substrates
Semiconductors,
2016
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[28]
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Growing c-axis oriented aluminum nitride films by Plasma-Enhanced Atomic Layer Deposition at low temperatures
Journal of Crystal Growth,
2016
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Growth and Characterization of Aln Thin Film Deposited by Sol-Gel Spin Coating Techniques
Advanced Materials Research,
2015
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Growth of Mn-doped ZnO thin films by rf-sputter deposition and lattice relaxation by energetic ion impact
Applied Surface Science,
2015
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