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M. M. Sisto, S. García-Blanco, L. L. Noc, B. Tremblay, Y. Desroches, J.-S. Caron, F. Provencal and F. Picard, “Pressure Sensing in Vacuum Hermetic Micropackaging in MOEMS-MEMS,” Journal of Micro/Nanolithography, MEMS, and MOEMS, Vol. 9, No. 4, 2012, Article ID: 041109.
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