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A. K. Isamil, J. S. Burdess, A. J. Harris, C. J. McNeil and J. Hedley, et al., “The Principle of a MEMS Circular Diaphragm Mass Sensor,” Journal Micromechanics Microengineering, Vol. 16, No. 8, 2006, pp. 1487-1493. doi:10.1088/0960-1317/16/8/008

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