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Lu, J., Chu, J., Huang, W. and Ping, Z. (2002) Preparation of thick Pb(Zr, Ti)O3 (PZT) film by electrostatic spray deposition (ESD) for application in micro-system tech-nology. Japanese Journal of Applied Physics, 41, 4317- 4320. doi:10.1143/JJAP.41.4317

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