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T. A. Friedmann, J. P. Sullivan, J. A. Knapp, D. R. Tallant, D. M. Follstaedt, D. I. Medlin and P. B. Mirkarimi, “Thick Stress-Free Amorphous-Tetrahedral Carbon Films with Hardness Near That of Diamond,” Applied Physics Letters, Vol. 71, No. 26, 1997, p. 3820. doi:10.1063/1.120515

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