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C. Damasceno, S. S. Camargo Jr., F. L. Freire Jr. and R. Carius, “Deposition of Si-DLC Films with High Hardness, Low Stress and High Deposition Rates,” Surface and Coatings Technology, Vol. 133-134, 2000, pp. 133-134. doi:10.1016/S0257-8972(00)00932-4

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