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Bosseboeuf, A., Lemettre, S., Wu, M., Moulin, J., Coste, P., Bessouet, C., Hammami, S., Renard, C. and Vincent, L. (2019) Effect of Environment on Activation and Sorption of Getter Alloys and Multilayers for Hybrid Wafer-Level Vacuum Packaging. Sensor and Materials, 31, 2825-2849.
https://doi.org/10.18494/SAM.2019.2312

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