Kheyraddini Mousavi, A., Alaie, S. and Leseman, Z.C. (2016) Basic MEMS Actuators. In: Encyclopedia of Nanotechnology, Wiley, New York, 1-16.
https://doi.org/10.1007/978-94-007-6178-0_292-2

has been cited by the following article:

• TITLE: Enhancing Mechanical Stability of Nano-Structured Anti-Reflection Coatings

  AUTHORS: Behnam Kheyraddini Mousavi, Tito Busani, Mani Hossein Zadeh, Steven Roy Julien Brueck

  KEYWORDS: Maximum Transmission, Mechanical Stability, Reflection, Laser, Nano-Structure

  JOURNAL NAME: Journal of Applied Mathematics and Physics, Vol.8 No.2, February 6, 2020

  ABSTRACT: Periodic Nanostructured anti-reflection coatings (NALs) are a promising option for enhancing transmission of coherent light without inducing scattering. We’ve found that reducing the height of NALs below a critical value to enhance mechanical stability can highly reduce the transmission efficiency. Here, using Rigorous Couples Wave Analysis (RCWA), we find the minimum height for over 99% transmission and effect of height on transmission bandwidth. Then, during a one-step plasma etching, two samples with different heights have been generated and their efficiency is evaluated using RCWA.