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Engelke, R., Engelmann, G., Gruetzner, G., Heinrich, M., Kubenz, M. and Mischke, H. (2004) Complete 3D UV Microfabrication Technology on Strongly Sloping Topography Substrates Using Epoxy Photoresist SU-8. Microelectronic Engineering, 73-74, 456-462.
http://dx.doi.org/10.1016/S0167-9317(04)00193-5

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