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M. K. Park, H. N. Kim, K. S. Lee, S. S. Baek, E. S. Kang, Y. K. Baek and D. K. Kim, “Effect of Microstructure on Dielectric Properties of Si3N4 at Microwave Frequency,” Key Engineering Materials, Vol. 287, 2005, pp. 247-252. doi:10.4028/www.scientific.net/KEM.287.247

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