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Zangenberg, N.R., Fage-Pedersen, J., Hansen, J.L. and Larsen A.N. (2003) Boron and Phosphorus Diffusion in Strained and Relaxed Si and SiGe. Journal of Applied Physics, 94, 3883-3891.
http://dx.doi.org/10.1063/1.1602564

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