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R. Merry, M. Uyanik, R. Van de Molengraft, R. Koops, M. Van Veghel and M. Steinbuch, “Identification, Control and Hysteresis Compensation of a 3 DOF Metrological AFM,” Asian Journal of Control, Vol. 11, No. 2, 2009, pp. 130-143. doi:10.1002/asjc.89

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