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T. Minami, K. Oohashi, S. Takata and N. Ogawa, “Preparations of ZnO:Al Transparent Conducting Films by d.c. Magnetron Sputtering,” Thin Solid Films, Vol. 193-194, Part 2, 1990, pp. 721-729. doi:10.1016/0040-6090(90)90224-2

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