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Author(s): |
Gui-rong Zhao, School of Material Science & Engineering, Xi’an University of Technology, Xi’an, China
Gao-yang Zhao, School of Material Science & Engineering, Xi’an University of Technology, Xi’an, China
Huang-li Zhang, School of Material Science & Engineering, Xi’an University of Technology, Xi’an, China |
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Abstract: |
YBCO superconducting film has attracts great attentions and has wide applications in the field of electronics such as filters, infrared detectors, THz antennas, etc. In the application of YBCO films, the preparation of its fine patterns with high performance plays a key role. In the paper，The photosensitive chelates are formed in YBCO gel films by chemical modification，Based on the photosensitivity of the YBCO gel films, YBCO patterned films were fabricated by irradiating the gel film with UV light through a mask followed by dissolving the non-irradiated area in a suitable solvent. After the patterned YBCO gel films were heat treated, patterned YBCO superconducting films were obtained.
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